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Shuo Chen

1PUBLICATIONS

1CO-AUTHORS

Microelectromechanical systems (MEMS)

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Publications (1)

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|Feb 11, 2023

A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy.

Shuo Chen, Liuhaodong Feng, Song Guo

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Song Guo

Frequent Collaborators

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Song Guo

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