Song Guo
4PUBLICATIONS
3CO-AUTHORS
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Publications (4)
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|Feb 11, 2023
A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy.Shuo Chen, Liuhaodong Feng, Song Guo
|Jan 21, 2023
Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.Liuhaodong Feng, Shuwen Zeng, Yongquan Su
|Dec 23, 2022
Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter-Heater Unit.Xinlin Peng, Yucheng Ji, Shuo Chen
|Dec 11, 2022
Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement.Song Guo, Liuhaodong Feng, Shuo Chen
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