Zhenyu Wu

6PUBLICATIONS
12CO-AUTHORS
Microelectromechanical systems (MEMS)AvionicsQuantum technologiesCircuits and systemsSimulation, modelling, and programming of mechatronics systems
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Publications (6)

|Jun 05, 2026
Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors.

|Feb 24, 2024
Water-Immersible MEMS Mirror with a Large Optical Aperture.

Yi Yang, Yichen Liu, Yongquan Su

|Feb 01, 2023
Realization of high-dynamic-range broadband magnetic-field sensing with ensemble nitrogen-vacancy centers in diamond.

Cao Wang, Qihui Liu, Yuqiang Hu

|Jan 21, 2023
Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.

Liuhaodong Feng, Shuwen Zeng, Yongquan Su

|Sep 23, 2022
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.

Yichen Liu, Lihao Wang, Yongquan Su

|Apr 23, 2022
Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films.

Hao Zhang, Yang Wang, Lihao Wang

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Frequent Collaborators

3 joint publications

Yichen Liu

2 joint publications

Yang Wang

1 joint publications

Liuhaodong Feng

1 joint publications

Song Guo