Yichen Liu
3PUBLICATIONS
2CO-AUTHORS
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Publications (3)
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|Feb 24, 2024
Water-Immersible MEMS Mirror with a Large Optical Aperture.Yi Yang, Yichen Liu, Yongquan Su
|Sep 23, 2022
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.Yichen Liu, Lihao Wang, Yongquan Su
|Apr 23, 2022
Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films.Hao Zhang, Yang Wang, Lihao Wang
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