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Yichen Liu

3PUBLICATIONS

2CO-AUTHORS

AvionicsSimulation, modelling, and programming of mechatronics systemsMicroelectronics

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Publications (3)

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|Feb 24, 2024

Water-Immersible MEMS Mirror with a Large Optical Aperture.

Yi Yang, Yichen Liu, Yongquan Su

|Sep 23, 2022

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.

Yichen Liu, Lihao Wang, Yongquan Su

|Apr 23, 2022

Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients <i>d</i><sub>31</sub> and <i>d</i><sub>33</sub> of AlN and AlScN Thin Films.

Hao Zhang, Yang Wang, Lihao Wang

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Frequent Collaborators

3 joint publications

Zhenyu Wu

1 joint publications

Yang Wang

Frequent Collaborators

3 joint publications

Zhenyu Wu

1 joint publications

Yang Wang

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