Michael Tanksalvala
3PUBLICATIONS
25CO-AUTHORS
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Publications (3)
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|Dec 18, 2023
Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging.Yuka Esashi, Nicholas W Jenkins, Yunzhe Shao
|Feb 11, 2021
Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry.Michael Tanksalvala, Christina L Porter, Yuka Esashi
|Oct 23, 2018
Full-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams.Robert M Karl, Giulia F Mancini, Joshua L Knobloch
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Frequent Collaborators
3 joint publications
Henry C Kapteyn
2 joint publications
Robert M Karl
2 joint publications
Christina L Porter
2 joint publications
Daniel E Adams
2 joint publications
Yuka Esashi
2 joint publications
Nicholas W Jenkins
1 joint publications
Travis D Frazer
1 joint publications
Jorge N Hernandez-Charpak
1 joint publications
Dennis F Gardner
1 joint publications
Galen P Miley
