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Chulhee Cho

14PUBLICATIONS

7CO-AUTHORS

Catalysis and mechanisms of reactionsColloid and surface chemistryChemical and thermal processes in energy and combustionPlasma physics; fusion plasmas; electrical dischargesEngineering electromagnetics

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Publications (14)

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|Sep 09, 2023

Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma.

Inho Seong, Sijun Kim, Minsu Choi

|Aug 26, 2023

Characterization of SiO<sub>2</sub> Plasma Etching with Perfluorocarbon (C<sub>4</sub>F<sub>8</sub> and C<sub>6</sub>F<sub>6</sub>) and Hydrofluorocarbon (CHF<sub>3</sub> and C<sub>4</sub>H<sub>2</sub>F<sub>6</sub>) Precursors for the Greenhouse Gas Emissions Reduction.

Minsu Choi, Youngseok Lee, Yebin You

|May 27, 2023

Contribution of Ion Energy and Flux on High-Aspect Ratio SiO<sub>2</sub> Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C<sub>4</sub>F<sub>8</sub> Plasma: Individual Ion Energy and Flux Controlled.

Wonnyoung Jeong, Sijun Kim, Youngseok Lee

|Apr 28, 2023

On the Quenching of Electron Temperature in Inductively Coupled Plasma.

Inho Seong, Si-Jun Kim, Youngseok Lee

|Apr 13, 2023

Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method.

Chulhee Cho, Sijun Kim, Youngseok Lee

|Mar 11, 2023

Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process.

Si-Jun Kim, Min-Su Choi, Sang-Ho Lee

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Frequent Collaborators

14 joint publications

Youngseok Lee

14 joint publications

Inho Seong

10 joint publications

Sijun Kim

9 joint publications

Shinjae You

6 joint publications

Jangjae Lee

3 joint publications

Youbin Seol

2 joint publications

Yebin You

Frequent Collaborators

14 joint publications

Youngseok Lee

14 joint publications

Inho Seong

10 joint publications

Sijun Kim

9 joint publications

Shinjae You

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