Jangjae Lee
9PUBLICATIONS
7CO-AUTHORS
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Publications (9)
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|Nov 26, 2022
Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma.Inho Seong, Jinho Lee, Sijun Kim
|Nov 11, 2022
Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe.Youngseok Lee, Heejung Yeom, Daehan Choi
|Sep 09, 2022
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma.Chulhee Cho, Sijun Kim, Youngseok Lee
|Aug 26, 2022
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath.Inho Seong, Sijun Kim, Youngseok Lee
|Aug 26, 2022
Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO2.Youngseok Lee, Sijun Kim, Jangjae Lee
|Aug 12, 2022
Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation.Si-Jun Kim, In-Ho Seong, Young-Seok Lee
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