Hui Deng

4PUBLICATIONS
3CO-AUTHORS
Compound semiconductorsMetals and alloy materialsNanofabrication, growth and self assemblyChemical and thermal processes in energy and combustion
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Publications (4)

|May 06, 2026
High-Efficiency and Low-Temperature Direct Bonding of SiC to Si via Atmospheric Inductively Coupled Plasma Activation.

|Mar 31, 2026
Atomic-scale reconstruction of sapphire induced by selective tribochemical removal of surface atoms.

Jinhao Zhang, Chunhong Li, Yinhui Wang

|Oct 12, 2023
A General and Ultrafast Polishing Method with Truly Atomic Roughness.

Yi Zhang, Yongjie Zhang, Kaixuan Gu

|Sep 08, 2022
Tuning the Plasma Etching Mode for the Atomic-Scale Smoothing of Single-Crystal Silicon.

Bing Wu, Yi Zhang, Rong Yi

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Frequent Collaborators

1 joint publications

Jinhao Zhang

1 joint publications

Yinhui Wang

1 joint publications

Quanpeng He