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Dmitry I Rogilo

1PUBLICATIONS

4CO-AUTHORS

Nanoscale characterisation

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Publications (1)

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|Feb 22, 2023

Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology.

Dmitry V Sheglov, Dmitry I Rogilo, Liudmila I Fedina

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Dmitry V Sheglov

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Liudmila I Fedina

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Sergey V Sitnikov

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Alexander V Latyshev

Frequent Collaborators

1 joint publications

Dmitry V Sheglov

1 joint publications

Liudmila I Fedina

1 joint publications

Sergey V Sitnikov

1 joint publications

Alexander V Latyshev

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