Hongli Li
3PUBLICATIONS
5CO-AUTHORS
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Publications (3)
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|Jan 08, 2025
On-machine separation and compensation of target mirror's surface shape errors in multidimensional interferometric measurement system.Zuyang Zhang, Qiangxian Huang, Jun Lu
|May 13, 2024
Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics.Fan Zhang, Qiangxian Huang, Chibin Zhang
|Oct 20, 2023
Development of submicron precision three-dimensional low cross-interference air-floating motion stage.Fan Zhang, Qiangxian Huang, Yunsheng Ye
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