Fan Zhang
3PUBLICATIONS
6CO-AUTHORS
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Publications (3)
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|May 13, 2024
Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics.Fan Zhang, Qiangxian Huang, Chibin Zhang
|Oct 20, 2023
Development of submicron precision three-dimensional low cross-interference air-floating motion stage.Fan Zhang, Qiangxian Huang, Yunsheng Ye
|Jun 01, 2022
Large-scale and high-depth three dimensional scanning measurement system and algorithm optimization.Fan Zhang, ZhenYang Li, Liansheng Zhang
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