Jin Young Lee

1PUBLICATIONS
2CO-AUTHORS
Non-metal chemistry
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Publications (1)

|May 25, 2024
Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.

Nguyen Hoang Tung, Heesoo Lee, Duy Khoe Dinh

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Frequent Collaborators

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Nguyen Hoang Tung

1 joint publications

Hyeong-U Kim