Hyeong-U Kim

14PUBLICATIONS
19CO-AUTHORS
Modelling and simulationChemical and thermal processes in energy and combustionNon-metal chemistryElectrochemistryComposite and hybrid materials
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Publications (14)

|Jun 24, 2026
Machine Learning-Enabled In Situ Diagnostics for Intelligent Plasma-Based Semiconductor Manufacturing: A Review.

|Nov 27, 2024
Data-Driven Analysis of High-Temperature Fluorocarbon Plasma for Semiconductor Processing.

Sung Kyu Jang, Woosung Lee, Ga In Choi

|May 25, 2024
Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.

Nguyen Hoang Tung, Heesoo Lee, Duy Khoe Dinh

|Oct 14, 2023
Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition.

Seunghwan Lee, Yonggyun Park, Pengzhan Liu

|Jul 08, 2023
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.

Yonggyun Park, Pengzhan Liu, Seunghwan Lee

|Jun 28, 2023
Key Factors in Enhancing Pseudocapacitive Properties of PANI-InOx Hybrid Thin Films Prepared by Sequential Infiltration Synthesis.

Jiwoong Ham, Hyeong-U Kim, Nari Jeon

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Frequent Collaborators

3 joint publications

Taesung Kim

2 joint publications

Boyun Choi

1 joint publications

Atul Kulkarni

1 joint publications

Hyunho Seok