Chin-Wook Chung

4PUBLICATIONS
3CO-AUTHORS
Plasma physics; fusion plasmas; electrical dischargesPhotovoltaic power systemsTerahertz physicsLasers and quantum electronics
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Publications (4)

|Aug 12, 2026
Correction to "Damage-Free Plasma Source for Atomic-Scale Processing".

|Jul 22, 2026
Correction to "Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma".

|Feb 07, 2025
Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma.

Min-Seok Kim, Chang-Min Lim, Sung Hoon Kim

|Sep 06, 2024
Damage-Free Plasma Source for Atomic-Scale Processing.

Junyoung Park, Jiwon Jung, Min-Seok Kim

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Frequent Collaborators

2 joint publications

Hyeongtag Jeon

1 joint publications

Junyoung Park

1 joint publications

Ju-Ho Kim