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Chin-Wook Chung

2PUBLICATIONS

1CO-AUTHORS

Terahertz physicsLasers and quantum electronics

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Publications (2)

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|Feb 07, 2025

Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma.

Min-Seok Kim, Chang-Min Lim, Sung Hoon Kim

|Sep 06, 2024

Damage-Free Plasma Source for Atomic-Scale Processing.

Junyoung Park, Jiwon Jung, Min-Seok Kim

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Hyeongtag Jeon

Frequent Collaborators

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Hyeongtag Jeon

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