Steven M George

9PUBLICATIONS
22CO-AUTHORS
Polymers and plasticsElemental semiconductorsTerahertz physicsChemical and thermal processes in energy and combustionCrystallography
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Publications (9)

|Feb 19, 2024
Building Semipermeable Films One Monomer at a Time: Structural Advantages via Molecular Layer Deposition vs Interfacial Polymerization.

Brian C Welch, Emma N Antonio, Thomas P Chaney

|Jul 14, 2023
Area-Selective Atomic Layer Deposition of ZnO on Si\SiO2 Modified with Tris(dimethylamino)methylsilane.

Behnam Moeini, Tahereh G Avval, Hidde H Brongersma

|Oct 26, 2020
Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C.

Jaclyn K Sprenger, Huaxing Sun, Andrew S Cavanagh

|Jun 02, 2020
Mechanisms of Thermal Atomic Layer Etching.

Steven M George

|Apr 21, 2020
Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition.

Matthias J Young, Nicholas M Bedford, Angel Yanguas-Gil

|Jun 29, 2019
In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs.

Wenjie Lu, Younghee Lee, Jonas C Gertsch

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Frequent Collaborators

2 joint publications

Huaxing Sun

1 joint publications

Yun Zhou

1 joint publications

Wenjie Lu

1 joint publications

Younghee Lee