Woo-Hee Kim

10PUBLICATIONS
18CO-AUTHORS
Water treatment processesTransition metal chemistryElemental semiconductorsMetals and alloy materialsElectrometallurgy
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Publications (10)

|May 01, 2026
Thermal atomic layer etching of copper via sequential chlorination and volatility-controlled hydration.

|Oct 14, 2025
Oxidation Dynamics and Surface Chemistry of Iridium and Iridium Oxide Films Grown by Atomic Layer Deposition Using O2 and O3.

Ji Won Han, Jae Woo Jang, Ryosuke Harada

|Sep 01, 2025
Atomic Layer Deposition of ZrO2 Films at High Temperatures (>350 °C) Using a Modified Cyclopentadienyl Zr Precursor.

Jae Chan Park, Chang Ik Choi, Hongseok Jang

|Jun 23, 2025
Oxidation-State-Dependent Selective Atomic Layer Etching of Metal Oxides.

Jeongbin Lee, Jae-Hong Noh, Jung-Tae Kim

|Mar 21, 2025
Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching.

Jeongbin Lee, Jung-Tae Kim, Jieun Oh

|Jul 01, 2024
Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors.

Jeong-Min Lee, Seo-Hyun Lee, Ji Hun Lee

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Frequent Collaborators

4 joint publications

Tae Joo Park

4 joint publications

Ji-Hoon Ahn

2 joint publications

Hyungjun Kim

2 joint publications

Jeong-Min Lee