Michael Fahrbach

5PUBLICATIONS
14CO-AUTHORS
Nanoelectromechanical systemsMicroelectromechanical systems (MEMS)Nonlinear optics and spectroscopyMicroelectronicsLasers and quantum electronics
Featured researcher

Get your video featured.

JoVEPublish with JoVE
Journal

Publications (5)

|Jan 25, 2025
Piezoresistive Cantilever Microprobe with Integrated Actuator for Contact Resonance Imaging.

Tianran Ma, Michael Fahrbach, Erwin Peiner

|Feb 28, 2023
Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography.

Michael Fahrbach, Min Xu, Wilson Ombati Nyang'au

|Sep 10, 2021
In-Line Measurement of the Surface Texture of Rolls Using Long Slender Piezoresistive Microprobes.

Linus Teir, Tuomas Lindstedt, Thomas Widmaier

|Jul 02, 2021
Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure.

Andi Setiono, Michael Fahrbach, Alexander Deutschinger

|Mar 06, 2021
Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements.

Min Xu, Zhi Li, Michael Fahrbach

Pageof 1