Justin M Shaw

1PUBLICATIONS
7CO-AUTHORS
Nanoscale characterisation
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Publications (1)

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|Dec 18, 2023
Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging.

Yuka Esashi, Nicholas W Jenkins, Yunzhe Shao

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Yuka Esashi

1 joint publications

Nicholas W Jenkins

1 joint publications

Yunzhe Shao

1 joint publications

Seungbeom Park

1 joint publications

Margaret M Murnane

1 joint publications

Henry C Kapteyn

1 joint publications

Michael Tanksalvala

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1 joint publications

Yuka Esashi

1 joint publications

Nicholas W Jenkins

1 joint publications

Yunzhe Shao

1 joint publications

Seungbeom Park

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