Dain Sung
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|Jul 16, 2024
Clean SiO2 atomic layer etching based on physisorption of high boiling point perfluorocarbon.Dain Sung, Hyunwoo Tak, Heeju Kim
|Feb 25, 2022
Investigation of SiO2 Etch Characteristics by C6F6/Ar/O2 Plasmas Generated Using Inductively Coupled Plasma and Capacitively Coupled Plasma.Dain Sung, Long Wen, Hyunwoo Tak
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