Reza Tafrishi

3PUBLICATIONS
6CO-AUTHORS
Chemical and thermal processes in energy and combustionReaction engineering (excl. nuclear reactions)Organometallic chemistry
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Publications (3)

|Mar 09, 2026
A combined experimental and theoretical study on electron induced fragmentation of methyl acetate, a model compound for side chain fragmentation and decarboxylation as pathways to main chain scission of polymethyl methacrylate as EUV lithography resist material.

Reza Tafrishi, Diogo Sequeira, Casey Johnson

|Jun 28, 2023
Low-energy electron interaction with 2-(trifluoromethyl)acrylic acid, a potential component for EUVL resist material.

Reza Tafrishi, Daniela Torres-Diaz, Lionel Amiaud

|Apr 08, 2022
Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition.

Po-Yuan Shih, Reza Tafrishi, Maicol Cipriani

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Frequent Collaborators

3 joint publications

Oddur Ingólfsson

1 joint publications

Maicol Cipriani

1 joint publications

Armin Gölzhäuser

1 joint publications

Daniela Torres-Diaz