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Casey Johnson

1PUBLICATIONS

3CO-AUTHORS

Chemical and thermal processes in energy and combustion

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|Mar 09, 2026

A combined experimental and theoretical study on electron induced fragmentation of methyl acetate, a model compound for side chain fragmentation and decarboxylation as pathways to main chain scission of polymethyl methacrylate as EUV lithography resist material.

Reza Tafrishi, Diogo Sequeira, Casey Johnson

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Oddur Ingólfsson

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Filipe Ferreira da Silva

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Oddur Ingólfsson

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