Casey Johnson
1PUBLICATIONS
3CO-AUTHORS

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Publications (1)
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|Mar 09, 2026
A combined experimental and theoretical study on electron induced fragmentation of methyl acetate, a model compound for side chain fragmentation and decarboxylation as pathways to main chain scission of polymethyl methacrylate as EUV lithography resist material.Reza Tafrishi, Diogo Sequeira, Casey Johnson
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