Yayi Wei
4PUBLICATIONS
3CO-AUTHORS
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Publications (4)
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|Oct 13, 2025
Effective intra-field overlay compensation in lithography via mask-level thermal and mechanical control.Dinghai Rui, Libin Zhang, Yayi Wei
|Sep 08, 2025
Method of high-order advanced lithography overlay correction to enhance the manufacturing performance of integrated circuits.Dinghai Rui, Libin Zhang, Yayi Wei
|Apr 15, 2025
Enhancing lithographic accuracy by mitigating overlay errors via mask-induced thermal and mechanical optimization.Dinghai Rui, Libin Zhang, Yayi Wei
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