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Dinghai Rui

3PUBLICATIONS

2CO-AUTHORS

Chemical and thermal processes in energy and combustionMachining

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Publications (3)

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|Oct 13, 2025

Effective intra-field overlay compensation in lithography via mask-level thermal and mechanical control.

Dinghai Rui, Libin Zhang, Yayi Wei

|Sep 08, 2025

Method of high-order advanced lithography overlay correction to enhance the manufacturing performance of integrated circuits.

Dinghai Rui, Libin Zhang, Yayi Wei

|Apr 15, 2025

Enhancing lithographic accuracy by mitigating overlay errors via mask-induced thermal and mechanical optimization.

Dinghai Rui, Libin Zhang, Yayi Wei

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Frequent Collaborators

3 joint publications

Libin Zhang

3 joint publications

Yayi Wei

Frequent Collaborators

3 joint publications

Libin Zhang

3 joint publications

Yayi Wei

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