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Rong Chen

2PUBLICATIONS
0CO-AUTHORS
Instrumental methods (excl. immunological and bioassay methods)Simulation, modelling, and programming of mechatronics systems
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Journal

Publications (2)

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|Jan 03, 2019
Development of a scanning probe microscopy integrated atomic layer deposition system for <i>in situ</i> successive monitoring of thin film growth.

Kun Cao, Quan Hu, Jiaming Cai

|Dec 03, 2017
Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition.

Xiaolei Wang, Yun Li, Jilong Lin

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