Jiayang Li
2PUBLICATIONS
2CO-AUTHORS
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Publications (2)
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|Jan 09, 2026
Remote Plasma Selective Silicon Etching Enabled Tunable Sub-Fin Process for Improved Parasitic Bottom Channel Control in Gate-All-Around Nanosheet Field-Effect Transistors.Jiayang Li, Yuan Gao, David Wei Zhang
|Oct 15, 2025
Highly Selective Isotropic Etching of Si to SiGe Using CF4/O2/N2 Plasma for Advanced GAA Nanosheet Transistor.Jiayang Li, Xin Sun, Ziqiang Huang
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