Xin Sun
6PUBLICATIONS
4CO-AUTHORS
Get your video featured.
Publish with JoVEGet your video featured.
Publish with JoVE
Publications (6)
Sort by Publication Date:
|Oct 15, 2025
Highly Selective Isotropic Etching of Si to SiGe Using CF4/O2/N2 Plasma for Advanced GAA Nanosheet Transistor.Jiayang Li, Xin Sun, Ziqiang Huang
|Jun 13, 2024
A Comprehensive Study of NF3-Based Selective Etching Processes: Application to the Fabrication of Vertically Stacked Horizontal Gate-All-around Si Nanosheet Transistors.Xin Sun, Jiayang Li, Lewen Qian
|Aug 26, 2023
A Novel Atomic-Level Post-Etch-Surface-Reinforcement Process for High-Performance p-GaN Gate HEMTs Fabrication.Luyu Wang, Penghao Zhang, Kaiyue Zhu
|Jun 28, 2023
A Novel Scheme for Full Bottom Dielectric Isolation in Stacked Si Nanosheet Gate-All-Around Transistors.Jingwen Yang, Ziqiang Huang, Dawei Wang
|Mar 29, 2023
Impact of Stress and Dimension on Nanosheet Deformation during Channel Release of Gate-All-Around Device.Jingwen Yang, Kun Chen, Dawei Wang
|Feb 11, 2023
A Novel Si Nanosheet Channel Release Process for the Fabrication of Gate-All-Around Transistors and Its Mechanism Investigation.Xin Sun, Dawei Wang, Lewen Qian
Pageof 1
