Lewen Qian

3PUBLICATIONS
3CO-AUTHORS
Nanoelectromechanical systemsElemental semiconductorsElectrical energy generation (incl. renewables, excl. photovoltaics)
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Publications (3)

|Mar 13, 2026
3-Levels Vertically Stacked Si Nanosheet GAA pFETs with Low-Temperature Interface Treatment for Cryogenic Application.

Lewen Qian, Tao Liu, Meicheng Liao

|Jun 13, 2024
A Comprehensive Study of NF<sub>3</sub>-Based Selective Etching Processes: Application to the Fabrication of Vertically Stacked Horizontal Gate-All-around Si Nanosheet Transistors.

Xin Sun, Jiayang Li, Lewen Qian

|Jun 28, 2023
A Novel Scheme for Full Bottom Dielectric Isolation in Stacked Si Nanosheet Gate-All-Around Transistors.

Jingwen Yang, Ziqiang Huang, Dawei Wang

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Frequent Collaborators

3 joint publications

Tao Liu

2 joint publications

Xin Sun

1 joint publications

Xinlong Guo