Thijs Janssen

1PUBLICATIONS
8CO-AUTHORS
Catalysis and mechanisms of reactions
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Publications (1)

|May 22, 2024
In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN.

Marc J M Merkx, Ilker Tezsevin, Pengmei Yu

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Frequent Collaborators

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Marc J M Merkx

1 joint publications

Ilker Tezsevin

1 joint publications

Pengmei Yu

1 joint publications

Rik J Lengers