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Jiun-Ruey Chen

1PUBLICATIONS

8CO-AUTHORS

Catalysis and mechanisms of reactions

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Publications (1)

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|May 22, 2024

In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN.

Marc J M Merkx, Ilker Tezsevin, Pengmei Yu

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Frequent Collaborators

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Marc J M Merkx

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Ilker Tezsevin

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Pengmei Yu

1 joint publications

Thijs Janssen

1 joint publications

Rik J Lengers

1 joint publications

Wilhelmus M M Kessels

1 joint publications

Tania E Sandoval

1 joint publications

Adriaan J M Mackus

Frequent Collaborators

1 joint publications

Marc J M Merkx

1 joint publications

Ilker Tezsevin

1 joint publications

Pengmei Yu

1 joint publications

Thijs Janssen

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