Sho Nagai

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1CO-AUTHORS
Chemical and thermal processes in energy and combustion
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Publications (1)

|Aug 16, 2025
Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching.

Ko-Hei Sano, Yoshitaka Ono, Keishi Tsukiyama

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Ko-Hei Sano