Ko-Hei Sano

2PUBLICATIONS
1CO-AUTHORS
Chemical and thermal processes in energy and combustionElectrical energy generation (incl. renewables, excl. photovoltaics)
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Publications (2)

|Aug 16, 2025
Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching.

Ko-Hei Sano, Yoshitaka Ono, Keishi Tsukiyama

|Apr 23, 2024
Atmospheric Gas-Phase Catalyst Etching of SiO2 for Deep Microfabrication Using HF Gas and Patterned Photoresist.

Ko-Hei Sano, Yoshitaka Ono, Ryosuke Tobinaga

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Frequent Collaborators

1 joint publications

Sho Nagai