Rika Marui

1PUBLICATIONS
3CO-AUTHORS
Microelectronics
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Publications (1)

|Apr 14, 2026
Advancing EUV Patterning: Innovations in Resist Platforms, Patterning Strategies, and Computational Approaches.

Madan Rajendra Biradar, Gokhan Sagdic, Chenyun Yuan

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Frequent Collaborators

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Madan Rajendra Biradar

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Chenyun Yuan

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Christopher Kemper Ober