インターフェロメトリーにおける信号処理の最近の進歩に関するレビュー
Yifeng Wang1, Fangyuan Zhao1, Linbin Luo1
1Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Sensors (Basel, Switzerland)
|August 28, 2025
まとめ
このレビューは,高精度測定のための光学エンコーダー信号処理を対象としています. ホモディンとヘテロディンインターフェロメトリー技術を比較し,信号処理方法とハードウェアプラットフォームを詳細に説明しています.
科学分野:
- 光学とフォトニクス
- メトロロジーと測定科学
背景:
- 光学干渉計は,先進産業における高精度の移位および角度測定に不可欠です.
- 正確な光学エンコーダー信号処理,校正,補償は測定精度の達成に不可欠です.
研究 の 目的:
- 過去20年間の光学インターフェロメトリック測定における信号処理技術を全面的に検討する.
- 異なる方法の比較分析を行い,その利点と限界を強調する.
主な方法:
- ホモダインインターフェロメトリの信号処理技術 (例えば,エラーキャリブレーション,円パラメータ推定) のレビュー.
- ヘテロジンインターフェロメトリの信号処理技術 (例えば,パルスカウント,二乗相ロック,カルマンフィルタリング) のレビュー.
- 光学干渉信号処理に使用されるハードウェアプラットフォームの紹介.
主要な成果:
- 光学インターフェロメトリーの既定および新興信号処理技術の詳細な概要.
- ホモディン系とヘテロディン系における解調方法の比較分析
- さまざまな信号処理アプローチの強みと弱みを特定する.
結論:
- 信号処理技術は,光学インターフェロメトリック測定の精度に大きな影響を与えます.
- 特定の用途に適した技術を選択するには,異なる方法の特徴を理解することが不可欠です.
- この論文は,光学計測学の研究者やエンジニアにとって貴重な情報源となる.
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