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相关概念视频

Atomic Fluorescence Spectroscopy01:29

Atomic Fluorescence Spectroscopy

Atomic fluorescence spectroscopy (AFS) is an analytical technique that involves the electronic transitions of atoms in a flame, furnace, or plasma being excited by electromagnetic (EM) radiation. When these atoms absorb energy, they become excited and subsequently release energy as they return to their original state. This emitted light, or "fluorescence," is observed at a right angle to the incident beam. Both absorption and emission processes transpire at distinct wavelengths, which are...

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相关实验视频

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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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用于EUV光刻的化酸放大器

Seth Kruger1, Sri Revuru, Craig Higgins

  • 1College of Nanoscale Science and Engineering, University at Albany, Albany, New York 12203, USA.

Journal of the American Chemical Society
|July 3, 2009
PubMed
概括

开发了用于极端紫外线 (EUV) 光电阻的新酸放大器. 这些化合物产生酸,提高分辨率,灵敏度,降低线边粗度 (LER) 在EUV光刻.

科学领域:

  • 材料科学 材料科学 材料科学
  • 有机化学 有机化学
  • 纳米技术纳米技术

背景情况:

  • 极端紫外线 (EUV) 石版对于先进的半导体制造至关重要.
  • 光电阻在分辨率,灵敏度和线边粗度 (LER) 方面需要高性能.
  • 酸放大器在EUV光电阻化学中发挥着关键作用.

研究的目的:

  • 为了合成用于EUV光电阻的新型酸放大器.
  • 研究这些放大器的分解动力学和机制.
  • 评估它们在改善关键石版参数方面的表现.

主要方法:

  • 合成了五种新的有机化合物.
  • 使用-19核磁共振 (19F NMR) 进行化合物分解的动力学研究.
  • 在EUV光电阻器中对石版性能进行评估.

主要成果:

  • 四种合成的化合物作为有效的酸放大器起作用.
  • 自催化分解产生化硫酸.
  • 在没有基质的情况下,分解速度明显更快 (高达1430x).
  • 一种化合物cis-1-methyl-2-(4-(trifluoromethyl) phenylsulfonyloxy) cyclohexyl acetate,在分辨率,LER和灵敏度上同时显示出改善.

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In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
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Last Updated: Jun 22, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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结论:

  • 开发的酸放大器显示出对推进EUV光刻技术的前景.
  • 控制的酸生成是提高光电阻性能的关键.
  • 进一步优化可能会导致下一代EUV电阻器.