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Neutron Radiography and Computed Tomography of Biological Systems at the Oak Ridge National Laboratory's High Flux Isotope Reactor
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一个用于热中子成像的CMOS-MEMS像素传感器.

Roberto Mendicino1, Gian-Franco Dalla Betta2,3

  • 1Center for Sensing Solutions, Eurac Research, Via A. Volta 13A, 39100 Bolzano, Italy.

Micromachines
|May 27, 2023
PubMed
概括

这项研究引入了一种新的单立体3D像素传感器,用于热中子探测和成像. 它独特的设计实现了高效率,并验证了传感器的有效性.

科学领域:

  • 半导体物理 半导体物理
  • 粒子检测技术 粒子检测技术
  • 辐射成像技术 辐射成像

背景情况:

  • 传统的中子探测器往往缺乏高空间分辨率.
  • 单立体3D集成为先进的传感器架构提供了潜力.
  • 使用CMOS技术开发高效的热中子探测是一个持续的挑战.

研究的目的:

  • 介绍第一个用于热中子检测和成像的单体3D像素传感器.
  • 为了实现高空间颗粒度和中子检测效率.
  • 通过实验性表征来验证传感器设计.

主要方法:

  • 使用CMOS SOIPIX技术与深度反应离子蚀刻用于微结构后侧腔.
  • 使用Geant4模拟来估计10B转换器中子检测效率.
  • 在25x25像素的原型上使用α粒子进行功能测试.

主要成果:

  • 展示了一个具有35 × 40 μm2像素颗粒度的单体3D传感器.
  • 模拟预测使用10B转换器的中子检测效率高达30%.
  • 使用α粒子进行的实验测试验证了传感器的设计和功能.
关键词:
这是一个前端的前端.微观结构的传感器单立体传感器的传感器.固态探测器 固态探测器热中子探测器 热中子探测器

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结论:

  • 开发的单立体3D像素传感器是热中子检测的重大进步.
  • 传感器架构能够实现高空间分辨率,能量分辨和电荷共享.
  • 这项技术对未来在中子成像和科学研究中的应用具有前景.