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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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基于矩形振幅面具的自动聚焦方法,具有很大的范围和高精度,用于微型LED晶圆缺陷检测系统.

Wenjun He1, Yufeng Ma1, Wenbo Wang1

  • 1College of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China.

Sensors (Basel, Switzerland)
|September 9, 2023
PubMed
概括

一种新的自动对焦方法使用矩形振幅面罩用于微型LED晶圆缺陷检测. 这种技术准确地测量了失焦量和方向,这对于精确的检查系统至关重要.

科学领域:

  • 光学和光子学 在光学和光子学.
  • 半导体制造业 半导体制造业

背景情况:

  • 自动对焦技术对于微型LED晶圆缺陷检测系统至关重要.
  • 精确测量失焦量和方向对于有效识别缺陷至关重要.

研究的目的:

  • 为微型LED晶片缺陷检测提出一个大范围,高精度的自动对焦方法.
  • 为了应对精确测量微LED晶片样本中失焦的挑战.

主要方法:

  • 用一个没有长边的矩形振幅面罩来调节掉落的激光束.
  • 调制改变了基于晶圆失焦的传感器上的反射激光点形状.
  • 失焦量和方向同时通过分析光点形状来确定.

主要成果:

  • 自动对焦系统实现了480微米的线性范围,具有20×显微镜镜头.
  • 测量精度达到1微米.
  • 该方法成功地同时获得了失焦量和方向.

结论:

  • 拟议的自动对焦方法提供了很大的线性范围和高精度.
  • 它的紧结构使其适用于微型LED晶圆缺陷检测设备.
  • 这种技术增强了半导体制造业中自动检查的能力.
关键词:
这是一个微型LED.自动聚焦功能 自动聚焦功能异常光束是一个异常光束.长方形的振幅面罩是一个矩形.

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