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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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反向设计的化反射器

Julian Pita, Frederic Nabki, Michaël Ménard

    Optics letters
    |February 15, 2024
    PubMed
    概括

    研究人员开发了新的化反射器,使用光子学的反向设计. 这些紧的,高反射率的设备适用于激光和光通信.

    科学领域:

    • 光子学是一种光子学.
    • 集成光学集成的光学.
    • 纳米光子学 纳米光子学

    背景情况:

    • 反射器是光子学中的关键组件,用于减弱器,过器和激光器等应用.
    • 现有的反射器设计往往在紧性和性能方面面临限制.

    研究的目的:

    • 介绍使用反向设计设计的新型化反射器.
    • 以反射率和带宽来描述它们的性能.
    • 为了证明它们适用于先进的光子集成电路.

    主要方法:

    • 利用反向设计技术创建了六个具有不同足迹的化反射器.
    • 在1530-1625nm波长范围内模拟反射率和带宽.
    • 在化多项目晶圆上制造的设备,使用单个蚀刻步骤.

    主要成果:

    • 开发了具有从4μm × 3μm到4μm × 8μm的足迹的反射器.
    • 对于较大的设备,实现了高达-0.09 dB的平均模拟反射率.
    • 对于较大的反射器来说,已经证明了172nm (1508-1680nm) 的1dB带宽.
    • 制造的4μm × 8μm反射器显示 -0.26±0.11 dB的反射率从1530-1600 nm.

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    结论:

    • 反向设计技术可以创建复杂而紧的化反射器.
    • 制造的反射器具有高反射率和宽带宽,适合高质量的因子腔.
    • 这些设备为激光器,光通信和其他光子集成电路的应用提供了巨大的潜力.