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Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over short distances...

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Updated: Jun 21, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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立体双远程中心相位测量偏移计.

Yingmo Wang1, Fengzhou Fang1

  • 1State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China.

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|October 16, 2024
PubMed
概括
此摘要是机器生成的。

本研究介绍了一种简化的校准方法,用于双电心相位测量偏移计 (PMD) 系统. 新方法通过使用单个平面镜子在三种姿势中提高测量精度和效率,简化了过程.

关键词:
偏向测量技术 (Deflectometry) 是一种方法.测量测量测量测量的测量有光学传感器.

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科学领域:

  • 光学计量学 在光学计量学
  • 计算机视觉 计算机视觉
  • 精密工程 精密工程是指精密的工程.

背景情况:

  • 传统的使用内心透镜的相位测量衍射计 (PMD) 需要复杂的校准.
  • 在PMD中的双电心镜头提供了减少扭曲和提高精度,但需要使用微定位阶段进行繁的外部参数校准.
  • 现有的双遥中心PMD校准方法耗时且限制了灵活性.

研究的目的:

  • 开发一种简化,灵活和高效的校准解决方案,用于立体双远心相位测量偏移计 (PMD).
  • 为了提高测量准确度和精确度在3D表面计量使用双远心PMD.
  • 为了消除对双远心镜头校准中微定位阶段的需求.

主要方法:

  • 一种新的校准方法,只使用一个平面镜子在三种姿势的立体双远心PMD.
  • 采用校准残留物,通过双立方赫米特插值构建反扭曲图,以准确定位.
  • 实施整体和灵活的校准策略,以优化外部参数.

主要成果:

  • 在100毫米×100毫米×200毫米的体积内,达到3.5微米的测量精度 (高峰到低谷).
  • 在不限制样品放置的情况下,证明了各种表面的可靠测量结果.
  • 与传统方法相比,大大降低了校准复杂性和时间.

结论:

  • 拟议的校准方法为立体双远心PMD系统提供了强大而高效的解决方案.
  • 该技术提高了测量精度和准确性,使其适用于各种表面计量应用.
  • 这种方法简化了校准过程,提高了先进光学计量学的实用性和可访问性.