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Updated: Jun 25, 2026

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

Published on: May 15, 2015

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使用重惰性扩散添加剂进行超合规原子层沉积

Arun Haridas Choolakkal1, Pamburayi Mpofu1, Pentti Niiranen1

  • 1Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden.

The journal of physical chemistry letters
|February 26, 2025
PubMed
概括

我们开发了一种超合规的原子层沉积 (ALD) 方法,使用一种沉重的惰性气体,克里普顿 (Kr),以改善纳米尺度特征的薄膜沉积. 这种新的方法提高了步骤覆盖率,这对于先进的半导体制造至关重要.

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