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Nuclear Transmutation03:20

Nuclear Transmutation

Nuclear transmutation is the conversion of one nuclide into another. It can occur by the radioactive decay of a nucleus, or the reaction of a nucleus with another particle. The first manmade nucleus was produced in Ernest Rutherford’s laboratory in 1919 by a transmutation reaction, the bombardment of one type of nuclei with other nuclei or with neutrons. Rutherford bombarded nitrogen-14 atoms with high-speed α particles from a natural radioactive isotope of radium and observed protons being...
Colloidal precipitates01:09

Colloidal precipitates

The high insolubility of some precipitates can result in an unfavorable relative supersaturation. This can lead to colloidal particles with a large surface-to-mass ratio, where adsorption is promoted. For instance, in the precipitation of silver chloride, silver ions are adsorbed on the surface of the colloidal particles, forming a primary layer. This layer attracts ions of opposite charge (such as nitrate ions), forming a diffuse secondary layer of adsorbed ions. This electric double layer...
Atomic Absorption Spectroscopy: Interference01:25

Atomic Absorption Spectroscopy: Interference

Interference leads to systematic error in atomic absorption (AA) measurements by enhancing or diminishing the analytical signal or the background. These interferences can be grouped into three main categories: spectral interference, chemical interference, and physical interference.
Spectral interference occurs when signals from other elements or molecules overlap with the analyte signal, falsely elevating or masking the analyte's absorbance. This interference can be corrected using Zeeman,...
Deleterious Substances in Aggregate01:25

Deleterious Substances in Aggregate

Deleterious substances in aggregates can be detrimental to the quality and durability of concrete. These substances include organic impurities like loam, which interfere with cement hydration and are usually present in the sand. These prevent a good bond between aggregate and cement paste. Organic impurities can be detected using the colorimetric test, where the darkness of a solution after agitation indicates the level of organic content.
Another type of impurity is clay and fine material that...
Superplasticizers01:30

Superplasticizers

Superplasticizers are advanced admixtures that enhance the workability of concrete by lowering the water content without compromising the strength of the material. These substances are highly effective water reducers, improving concrete flow, making it easier to work with, and enabling concrete to reach inaccessible areas or densely reinforced sections without mechanical vibration. The key components in superplasticizers are either sulfonated melamine or naphthalene formaldehyde condensates,...
Microbial Bioremediation of Uranium01:25

Microbial Bioremediation of Uranium

Microorganisms play a critical role in the transformation and immobilization of uranium in contaminated environments through four main pathways: bioreduction, biosorption, bioaccumulation, and biomineralization. These mechanisms reduce uranium’s toxicity and prevent its migration through groundwater systems, offering sustainable approaches for in situ bioremediation.Bioreduction of UraniumBioreduction is driven by anaerobic bacteria such as certain strains of Geobacter and Shewanella, which use...

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相关实验视频

Updated: Jun 25, 2026

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
10:52

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

Published on: May 15, 2015

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使用重惰性扩散添加剂进行超合规原子层沉积.

Arun Haridas Choolakkal1, Pamburayi Mpofu1, Pentti Niiranen1

  • 1Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden.

The journal of physical chemistry letters
|February 26, 2025
PubMed
概括

我们开发了一种超合规的原子层沉积 (ALD) 方法,使用一种沉重的惰性气体,克里普顿 (Kr),以改善纳米尺度特征的薄膜沉积. 这种新的方法提高了步骤覆盖率,这对于先进的半导体制造至关重要.

科学领域:

  • 材料科学 材料科学 材料科学
  • 纳米技术 纳米技术
  • 化学工程是化学工程的重要组成部分.

背景情况:

  • 缩小器件节点需要先进的沉积技术来填充纳米尺度的特征.
  • 原子层沉积 (ALD) 提供了精度,但缺乏某些应用所需的超规格V形沉积.
  • 目前的ALD方法在符合高比例结构的填充方面扎.

研究的目的:

  • 开发一种改进的原子层沉积 (ALD) 工艺,以实现超合规薄膜沉积.
  • 调查使用重惰性气体作为扩散添加剂来增强ALD的步骤覆盖.
  • 为了证明这种策略在填充高比例纳米尺度特征方面的有效性.

主要方法:

  • 实施了经过修改的原子层沉积 (ALD) 工艺,将 (Kr) 作为扩散添加剂.
  • 使用化 (AlN) 从三甲 (Al(CH3) 3) 和氨 (NH3) 沉积作为模型系统.
  • 在 Kr. 添加之前和之后,分析了18:1比例的步骤覆盖范围.

主要成果:

  • 实现了超合规沉积,在18:1的面积比特征中,步骤覆盖率从1增加到1.6.
  • 观察到较轻的前体分子 (NH3) 的增强扩散,由较重的Kr.气体促进.
  • 由于有针对性的扩散,在特征开口的每周期生长率有所减少.

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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model

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相关实验视频

Last Updated: Jun 25, 2026

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
10:52

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

Published on: May 15, 2015

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Atomically Traceable Nanostructure Fabrication
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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model

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结论:

  • 添加像Kr这样的沉重惰性气体可以实现超符合性原子层沉积 (ALD).
  • 这种方法显著提高了高比例纳米结构的步骤覆盖率.
  • 拟议的战略对半导体制造中的各种ALD工艺具有广泛的适用性.