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Updated: May 24, 2025

Fabrication of Fine Electrodes on the Tip of Hypodermic Needle Using Photoresist Spray Coating and Flexible Photomask for Biomedical Applications

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Published on: November 28, 2017

在微芯片侧墙上制造微电极,用于注射生物医疗器械.

Shiva Sai Yeshala, Sultan Mahmud, Nicholas G Rudawski

Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference

|March 5, 2025

概括

这项研究提出了一种新方法,通过在芯片侧壁上制造电极来制造更小的植入式医疗设备 (IMD). 这种技术利用聚焦于等离子的离子束来精确创建电极,改善神经监控的小型化.

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科学领域:

生物医学工程生物医学工程
材料科学材料科学材料科学
神经科学是一个神经科学.

背景情况:

植入式医疗器械 (IMD) 对于神经调制和大脑活动监测至关重要.
由于离芯片组件和复杂的组装,当前的IMD面临小型化挑战,影响大小和可靠性.
先进的CMOS技术为更小,无电池的IMD提供了潜力.

研究的目的:

为微型IMD引入一种新的集成技术.
为了减少整体体积和提高可植入神经设备的可靠性.
在封装CMOS芯片上演示精确的微电极制造.

主要方法:

在封装CMOS芯片的侧壁上制造微电极.
使用聚焦等离子离子束 (PFIB) 精确制造电极.
整合CMOS技术与用于微型化的新型电极放置.

主要成果:

通过侧墙电极集成实现了植入物尺寸的显著减少.
使用PFIB,证明了精确高效的微电极制造的可行性.
启用了更小,更可靠,更无电池的IMD的潜力.

结论:

这种新的集成技术成功地减少了IMD的大小.
PFIB可为先进的IMD设计提供精确的微电极制造.
这种方法为下一代小型神经监测和调制设备铺平了道路.