MEMS:POD-Kriging

Ananya Roy1, Francesco Rizzini2, Gabriele Gattere2

  • 1Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy.

Micromachines
|March 6, 2025
PubMed
概括

量化几何不确定性对于微电子机械系统 (MEMS) 微型化至关重要. 本研究提出了一种使用遗传算法和正确的直角分解来预测MEMS设备的过度蚀刻变异的新方法,提高了制造精度.