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Updated: Sep 13, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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通过在线光束密度调节生成移除函数的确定性方法.

Hongyu Zou, Hao Hu, Xiaoqiang Peng

    Optics express
    |July 30, 2025
    PubMed
    概括

    这项研究引入了一种新的离子束计算 (IBF) 方法,以精确控制光学元件制造. 它使用离子束密度的在线调节来生成动态移除函数,提高准确性和灵活性.

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