一个新型不对称的高性能MEMS摆形容量加速仪
Guangxian Dong1, Jia Jiang2, Weixin Wu1
1Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.
Micromachines
|October 29, 2025
概括
这项研究引入了一种新型的MEMS摆形加速度计,具有不对称的质量块,以提高灵敏度和稳定性. 它使用和ICP蚀刻制造,达到1.247V/g的灵敏度和0.8%的非线性.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 传感器技术 传感器技术
- 惯性测量单位 惯性测量单位
背景情况:
- 传统的加速度计在灵敏度和稳定性方面存在局限性.
- 在MEMS设备中的不对称设计可以提供更好的性能特征.
- 敏感结构与接口电路的集成对于实际的加速度计应用至关重要.
研究的目的:
- 提出和开发一种新的非对称微电子机械系统 (MEMS) 摆形加速度计.
- 通过不对称质量块设计,提高MEMS加速度计的灵敏度和结构稳定性.
- 制造和评估开发的MEMS加速度计及其接口电路的性能.
主要方法:
- 使用不对称质量块设计和制造一个MEMS敏感结构.
- 使用双面抛光 (100) N型晶片进行制造.
- 诱导合等离子体 (ICP) 蚀刻的应用,以实现传感器结构.
- 开发和制造一个互补的接口电路.
- 使用静态场翻转试验进行性能评估.
主要成果:
- 不对称的质量块设计显著提高了灵敏度和结构稳定性.
- 成功制造了MEMS加速度计及其接口电路.
- 实现了高灵敏度的1.247V/g.
- 在-2g至2g测量范围内,已证明低非线性为0.8%.
结论:
- 新型不对称的MEMS摆形加速度计表现出卓越的性能特征.
- 拟议的设计有效地提高了灵敏度和结构稳定性.
- 开发的传感器适用于需要精确加速度测量的应用.
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