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旋转补偿器光谱圆测量基于频率分割复杂化与延迟校准.
Jongkyoon Park1, Alexander Gliserin2, Sukhyun Choi3
1Semiconductor and Display Metrology Group, Korea Research Institute of Standards and Science, 267 Gajeongno, Yuseong-Gu, Daejeon, 34113, South Korea. qkrwhdrbs@kriss.re.kr.
Scientific reports
|November 27, 2025
概括
频率分割多重复合旋转补偿器光谱圆测量 (FDM-RCSE) 允许同时测量多波长的光学特性. 这种新的光谱圆测量技术提供了高精度的全面材料表征.
科学领域:
- 材料科学 材料科学 材料科学
- 光学物理学的光学物理学
- 计量学 计量学 计量学
背景情况:
- 光谱圆测量 (SE) 对于非破坏性材料的表征至关重要,包括光学常数和薄膜厚度.
- 现有的SE技术在同时进行多波长分析和全面的属性提取方面存在局限性.
研究的目的:
- 从理论和实验上证明一种新的频率分割多重复合旋转补偿器光谱圆测量 (FDM-RCSE) 技术.
- 为了使多个圆测量转移量 (ETQ) 在不同波长的同时测量.
主要方法:
- 采用了带有旋转补偿器和延迟校准的频率分割复杂化 (FDM).
- 采用了多个波长的激光和一个光谱集成探测器,用于同时获取ETQ.
- 将FDM-RCSE测量与商用SE仪器进行性能评估.
主要成果:
- 与商业SE相比,FDM-RCSE成功测量了Si晶片上的SiO2薄膜厚度,平均差异小于2 Å.
- 实现了高的测量可重现性,并使得可以提取更全面的光学特性,如去极化.
- 在没有光谱分析或波长切换的情况下,在多个波长下同时测量了三个ETQ.
结论:
- FDM技术可以有效地应用于带补偿器和延迟校准的圆测量.
- FDM-RCSE为先进的光学材料表征提供了一种多功能替代方案.
- 这种方法增强了SE的能力,可以对材料特性进行详细分析.
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