在CMOS兼容的 (001) 上,InAs量子点激光器与波导光探测器的单立体集成
Wenkang Zhan1,2, Chao Shen1,2, Lizhi Wang1,2
1State Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Nano letters
|February 13, 2026
概括
我们在上实现了InAs量子点激光二极管 (LD) 和波导光探测器 (WPD) 的单体集成. 这一突破使得对紧的光子集成电路的芯片内功率监控成为可能.
科学领域:
- 光子学 是一个光子学.
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
背景情况:
- 光学需要高效的芯片上激光二极管 (LD) 和与CMOS技术兼容的低噪声光探测器 (PD).
- 单体集成是推动光子集成电路 (PIC) 发展的关键.
研究的目的:
- 在CMOS兼容的平台上演示InAs量子点激光二极管 (LD) 和波导光探测器 (WPD) 的单体集成.
- 制定一项策略,精确定位和隔离LDs和WPDs用于紧的PIC.
主要方法:
- 在InAs量子点LD和 (001) 上的波导PD中使用了相同的表轴结构.
- 采用XeF2辅助的聚焦离子束沟,用于隔离LD和WPD组件.
- 描述了集成激光二极管和光探测器系统的性能.
主要成果:
- 在LD实现了170A/cm2的低门电流密度,在WPD实现了4.9×10−5A/cm2的低暗电流密度.
- 来自LD的单面连续波输出功率为48mW,以及WPD的宽O频谱响应.
- 观察到LD输出功率和WPD光电流之间的明显相关性,估计响应率为0.118A/W.
结论:
- 在上InAs QD LDs和WPDs的单体集成是可行的.
- 这种方法可以在芯片上进行功率监测,这对于紧和高密度光子集成至关重要.
- 开发的策略非常适合创建可靠和小型化的光子设备.
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