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无干涉图的自适应波面干涉测量:福里埃点分析,增强自适应补偿性能

Peng Gao, Qi Lu, Yifan Ding

|February 18, 2026

概括

适应波面干扰度 (AWI) 现在可以有效地测量具有较大偏差的自由形表面. 优化里埃点简化了测量,消除了波面传感器和相位转移,以获得高精度.

科学领域:

光学计量学是指光学计量学.
表面表征表征表征的表征表征.
自由形式的光学.

背景情况:

适应波面干涉测量 (AWI) 是高分辨率自由形表面测量的关键技术.
传统的AWI因依赖不完整的干涉图和复杂的程序而面临显著的表面偏差.

研究的目的:

引入一个改进的AWI方法,以提高方向优化和有效测量具有实质性偏差的自由形表面.
通过消除对波传感器和相位转移的需求来简化AWI过程.

主要方法:

在AWI框架内优化福里埃点 (FS).
在优化过程中消除波传感器和相位移动步骤.
通过数值模拟和实验测试验证.

主要成果:

在几十次代中,模拟了自由形波面的补偿,PV为109.1λ,RMS为13.49λ.
实验测量了一个自由形表面 (PV 104.1λ,RMS 24.89λ),最终误差为PV 0.89λ和RMS 0.17λ.
成功测量了最初无法区分的干扰边缘.

结论:

拟议的福里埃点位优化AWI (IF-AWI) 方法可以高效准确地测量具有显著偏差的自由形表面.
简化过程提高了AWI在具有挑战性的光学元件的实用性和适用性.

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