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相关概念视频

Focusing of Light in the Eye01:16

Focusing of Light in the Eye

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Light rays enter the eye through the cornea, a transparent dome-shaped tissue that is the eye's outermost layer. The cornea bends or refracts, light rays traveling to the pupil. The shape of the cornea determines how much of the light is bent and whether the image will be focused correctly on the retina at the back of the eye. Once the light has passed through both refraction layers, it converges into a single focal point onto a small area. This is where photoreceptors start transforming...
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相关实验视频

Updated: Feb 28, 2026

ODELAY: A Large-scale Method for Multi-parameter Quantification of Yeast Growth
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ODELAY: A Large-scale Method for Multi-parameter Quantification of Yeast Growth

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通过对焦控制来提高覆盖精度的一种方法.

Yanping Lan1, Jingchao Qi1, Mengxi Gui2

  • 1Shanghai Yuwei Semiconductor Technology Co., Ltd., Shanghai 201203, China.

Micromachines
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PubMed
概括
此摘要是机器生成的。

本研究引入了一种使用双波长光学和深度学习进行精确半导体覆盖测量的综合方法. 该方法在先进的工艺节点中提高了准确性和效率.

关键词:
这就是IBO IBO.双波长光学双波长光学焦点平面测量的焦点平面测量标记对准标记的对齐情况覆盖层 覆盖层 是一个覆盖层.

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Evaluating Targeting Accuracy in the Focal Plane for an Ultrasound-guided High-intensity Focused Ultrasound Phased-array System
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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques
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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

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相关实验视频

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ODELAY: A Large-scale Method for Multi-parameter Quantification of Yeast Growth

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Evaluating Targeting Accuracy in the Focal Plane for an Ultrasound-guided High-intensity Focused Ultrasound Phased-array System
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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques
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科学领域:

  • 半导体制造业 半导体制造业
  • 光学计量学 在光学计量学
  • 图像处理 图像处理

背景情况:

  • 覆盖测量精度对于半导体制造至关重要.
  • 焦平面检测显著影响覆盖精度和测量吞吐量.
  • 先进的过程节点需要提高准确性和效率.

研究的目的:

  • 开发一个综合优化策略,用于覆盖测量.
  • 在先进的工艺节点中解决准确性和效率之间的权衡.
  • 为了提高覆盖测量的精度和效率.

主要方法:

  • 实现了双波长,双探测器光学硬件架构.
  • 为不同的层选择独立的最佳成像波长.
  • 采用深度学习框架进行实时对准和失焦预测.
  • 利用协同的硬件和软件策略,以实现最佳的成像姿势.

主要成果:

  • 在没有干扰的情况下为每个层实现理想的成像条件.
  • 可同时预测和调整水平位置和失焦.
  • 有效地减轻了背景噪音和系统偏差.
  • 显著提高了覆盖测量的精度和效率.

结论:

  • 综合优化策略提高了覆盖测量性能.
  • 双波长光学和深度学习协同实现卓越的结果.
  • 这种方法对于满足先进半导体工艺节点的需求至关重要.