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相关实验视频

Updated: Jul 5, 2026

Fabrication and Characterization of Superconducting Resonators
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Fabrication and Characterization of Superconducting Resonators

Published on: May 21, 2016

Q优化的纳米电子机械钻石共振器

Evan L H Thomas1,2, Soumen Mandal3, William G S Leigh3

  • 1School of Physics and Astronomy, Cardiff University, Queen's Buildings, Cardiff, UK. thomas@impt.uni-hannover.de.

Microsystems & nanoengineering
|March 2, 2026
PubMed
概括

纳米晶体钻石 (NCD) 共振器显示出对高频应用的前景. 自由-自由几何学显著减少能量损失,实现高质量因素,并最大限度地减少先进的纳米机械设备的消散.

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科学领域:

  • 物理 物理学 物理
  • 材料科学 材料科学 材料科学
  • 纳米技术 纳米技术

背景情况:

  • 纳米机械共振器对于应用和基础物理学至关重要.
  • 纳米晶体钻石 (NCD) 适用于高频器件,因为它具有高的模和基板兼容性.
  • 设备微型化增加了紧和表面损失的消散的意义.

研究的目的:

  • 为了研究NCD纳米机械共振器中的散射机制.
  • 为了比较双和自由的共振器几何形状.
  • 评估表面抛光对共振器性能的影响.

主要方法:

  • 制造双束束和自由自由的共振器几何形状从成长和化学机械抛光的NCD.
  • 在12K时测量共振器质量因子 (Q因子).
  • 对长度依赖的损失和与表面相关的消散的分析.

主要成果:

  • 与双束梁相比,自由自由的几何形状减少了8.8×的散射.
  • 在40MHz和100MHz之间运行的自由自由共振器中,Q因子达到约10,000.
  • 在成长和抛光的NCD之间消散的最小差异表明在12K时的表面损失很低.

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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结论:

  • 自由-自由几何学有效地抑制了NCD纳米机械共振器中的散射.
  • 在冷温度下,NCD表现出较低的表面相关损失.
  • 结合NCD和free-free设计,为高频纳米机械共振器提供了一个有前途的途径,使消散率降到最低.