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Related Experiment Videos

A micromachined chip-based electrospray source for mass spectrometry.

L Licklider1, X Q Wang, A Desai

  • 1Division of Immunology, Beckman Research Institute of the City of Hope, Duarte, California 91010, USA.

Analytical Chemistry
|February 5, 2000
PubMed
Summary

This study presents a novel micromachining process for creating mass spectrometry electrospray sources on silicon chips using parylene. The fabricated chip-based emitters demonstrate comparable performance to conventional devices, enabling on-chip integration and mass production.

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Area of Science:

  • Analytical Chemistry
  • Materials Science
  • Microfabrication

Background:

  • Conventional electrospray sources for mass spectrometry often require complex manual assembly and integration.
  • There is a need for miniaturized, robust, and mass-producible electrospray interfaces for enhanced analytical capabilities.

Purpose of the Study:

  • To develop and characterize a micromachined electrospray source fabricated on a silicon chip.
  • To evaluate the performance of the chip-based electrospray emitters compared to traditional emitters.
  • To demonstrate the feasibility of integrating electrospray sources with other on-chip microfluidic systems.

Main Methods:

  • Utilized a micromachining process involving polymer (parylene) layers on a silicon substrate.
  • Employed photoresist as a sacrificial layer to create long microchannels and hollow needle structures.

Related Experiment Videos

  • Designed a reusable chip holder for electrical, gas, and sample connections to a mass spectrometer.

    • Main Results:

    • Fabricated robust parylene electrospray emitters with tapered tips and rectangular openings (5 x 10 microns).
    • Achieved stable electrospray operation using a high electric field, with performance comparable to glass or fused silica emitters in signal strength, stability, and spectral quality.
    • Demonstrated successful automated MS/MS analysis of tryptic peptides, yielding results identical to conventional nanospray devices.

    Conclusions:

    • The developed micromachining process enables the fabrication of efficient, on-chip electrospray interfaces for mass spectrometry.
    • Chip-based electrospray sources can be mass-produced using batch processing, offering a cost-effective and scalable solution.
    • This technology facilitates the integration of mass spectrometry with other microfluidic devices for comprehensive analytical applications.