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Updated: Jul 30, 2026
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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
Quantitative Energy-filtering Transmission Electron Microscopy in Materials Science.
1Research Institute for Electron Microscopy, Graz University of Technology, Steyrergasse 17, A-8010 Graz, Austria
Summary
Energy-filtered transmission electron microscopy (EFTEM) provides high-resolution elemental mapping for materials science. This technique detects secondary phases, quantifies elemental concentrations, and maps chemical bonding states, aiding in material characterization.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Energy-filtered transmission electron microscopy (EFTEM) offers high lateral resolution elemental distribution imaging.
- Short acquisition times make EFTEM suitable for rapid material analysis.
Purpose of the Study:
- To present typical materials science problems solvable with EFTEM.
- To demonstrate EFTEM's capabilities in elemental distribution, quantification, and chemical bonding state analysis.
Main Methods:
- Jump ratio imaging under rocking beam illumination for secondary phase detection.
- Conversion of elemental maps to concentration maps using partial ionization cross-sections (k-factors).
- Electron energy-loss near edge fine structure (ELNES) mapping for chemical bonding state differentiation.
Main Results:
- Secondary phases in steel were detected using jump ratio images.
- Quantitative chemical phase maps were generated from atomic ratio maps correlated via scatter diagrams.
- Diamond and non-diamond carbon were distinguished in coated materials using ELNES mapping of the C-K edge.
Conclusions:
- EFTEM is a versatile tool for detailed materials characterization.
- Advanced EFTEM techniques enable precise elemental quantification and chemical state analysis.
- ELNES mapping is effective for distinguishing different allotropes of elements like carbon.
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